Job Opportunity: Engineer I, Sustaining Process Engineering
Location: Ansan , South Korea.
Division: Materials Solutions (MS)
Reports To: Director of Fab Technology and Engineering
Core Purpose of the Role
The Sustaining Process Engineer will be a key member of the Hardware Sustaining team, responsible for maintaining stable performance of Atomic Layer Deposition (ALD) tools and associated process modules through upkeep and improvement of Entegris precursor delivery cabinet product line . This role focuses on cabinet reliability, process stability, troubleshooting, and continuous improvement to enable high volume production at our customers sites .
The engineer will collaborate closely with equipment engineers, technicians, and manufacturing teams to ensure our precursor delivery cabinet product line enables ALD hardware and process modules to operate at top performance with minimal downtime.
Entegris is seeking a highly motivated, customer-centric Global Sustaining Process Engineer to support our deploye d Precursor Delivery Systems Product Line globally . This role is essential to ensuring safe, high-quality, and timely installations while driving strategic capacity-building initiatives to support our customers and expand our market presence.
Key Responsibilities
1. Tool & Hardware Sustaining
Serve as technical owner for ALD hardware modules and chambers (thermal and plasma enhanced).
Work with our OEM/IDM partners to gain understanding of tool health, chamber performance, recipe stability, and hardware degradation trends , and analyze pain points, and provide input for product improvements.
Identify and resolve chronic tool issues, hardware failures, and long term reliability gaps.
Define and optimize preventive maintenance (PM) procedures to improve uptime and chamber stability.
Partner with Equipment Engineering to improve MTBF/MTTR and reduce unscheduled downtime.
2. Process Stability & Control
Provide tool understanding to improve process performance across the installed base of tools.
Monitor SPC charts, alarms, excursion trends, and chamber to chamber matching.
React quickly to out of-control or out of-spec conditions, performing rapid troubleshooting and recovery.
Support recipe tuning after hardware events (e.g., chamber clean, parts replacement, kit change).
3. Troubleshooting & Root Cause Analysis
Lead root cause investigations for process drift, particle issues, metrology shifts, and equipment faults.
Utilize structured problem solving methods (5 Why, Fishbone, DMAIC, 8 D).
